Invention Grant
- Patent Title: Z-position motion stage for use in a scanning probe microscopy system, scan head and method of manufacturing
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Application No.: US16652860Application Date: 2018-10-02
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Publication No.: US11035879B2Publication Date: 2021-06-15
- Inventor: Albert Dekker , Martinus Cornelius Johannes Maria van Riel , Aukje Arianne Annette Kastelijin
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL s-Gravenhage
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL s-Gravenhage
- Agency: Leydig, Voit, & Mayer, Ltd.
- Priority: EP17194366 20171002
- International Application: PCT/NL2018/050653 WO 20181002
- International Announcement: WO2019/070120 WO 20190411
- Main IPC: G01Q70/02
- IPC: G01Q70/02 ; G01Q10/04

Abstract:
The present document relates to a Z-position motion stage for use in a scanning probe microscopy system. The stage comprises a support element for mounting the z-position motion stage on a scan head, and at least one first actuator mounted on the support element for enabling motion of a probe of the scanning probe microscopy system. The probe is connected to or attachable to the z-position motion stage. The support element and the at least one first actuator are shaped and mounted such as to form a rotation symmetric element which is rotation symmetric around a notional common longitudinal axis. The document further relates to a scan head, a method of manufacturing a z-position motion stage, and a Z-position motion stage obtained with such a method.
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