Invention Grant
- Patent Title: Intermediate connection member and inspection apparatus
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Application No.: US16596012Application Date: 2019-10-08
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Publication No.: US11035883B2Publication Date: 2021-06-15
- Inventor: Jun Mochizuki , Hiroaki Hayashi , Kanji Suzuki
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2018-194623 20181015
- Main IPC: G01R1/04
- IPC: G01R1/04 ; G01R1/067 ; G01R1/073 ; G01R31/27 ; G01R1/20

Abstract:
There is provided an intermediate connection member provided between a first member having a plurality of first terminals and a second member having a plurality of second terminals to electrically connect the plurality of first terminals and the plurality of second terminals, respectively. The intermediate connection member includes: a block member including connection members configured to electrically connect the plurality of first terminals and the plurality of second terminals, respectively; a frame member having an insertion hole into which the block member is inserted; and an electronic component electrically connected to one of the connection members.
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