Invention Grant
- Patent Title: Drop placement evaluation
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Application No.: US15788462Application Date: 2017-10-19
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Publication No.: US11036130B2Publication Date: 2021-06-15
- Inventor: Matthew C. Traub , Tom H. Rafferty , Whitney Longsine , Yeshwanth Srinivasan , Van Nguyen Truskett
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B05D5/00

Abstract:
Methods and systems for dispensing fluid in imprint lithography, including selecting drop patterns, each associated with different target locations on a substrate and a selected volume for each drop of each drop pattern; selecting a plurality of subsets of nozzles of a dispenser, each subset configured to dispense drops corresponding to each drop pattern; for each drop pattern: dispensing the drops corresponding to the drop pattern from each subset of nozzles; obtaining an image of the drops from each subset of nozzles; and processing the image from each subset of nozzles to determine a positional error of the drops with respect to the target locations and a volumetric error of the drops with respect to the selected volume for each drop; and adjusting, based on the positional error and the volumetric error of the drops from each subset of nozzles for each drop pattern, dispense parameters of the dispenser.
Public/Granted literature
- US20190121231A1 DROP PLACEMENT EVALUATION Public/Granted day:2019-04-25
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