Invention Grant
- Patent Title: Fingerprint sensor device and method for manufacturing a semiconductor sensor device comprising a cover layer having an anisotropic dielectric constant
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Application No.: US16623443Application Date: 2018-08-21
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Publication No.: US11036955B2Publication Date: 2021-06-15
- Inventor: Hanna Nilsson , Adam Benson , Karl Lundahl
- Applicant: Fingerprint Cards AB
- Applicant Address: SE Gothenburg
- Assignee: Fingerprint Cards AB
- Current Assignee: Fingerprint Cards AB
- Current Assignee Address: SE Gothenburg
- Agency: RMCK Law Group, PLC
- Priority: SE1751020-7 20170825
- International Application: PCT/SE2018/050841 WO 20180821
- International Announcement: WO2019/039992 WO 20190228
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H01L27/01

Abstract:
A method for manufacturing a fingerprint sensor device. The method comprises providing a fingerprint sensor chip, arranging the fingerprint sensor chip on a carrier, depositing a cover layer on the fingerprint sensor chip, the cover layer comprising a polarizable material; moving a top electrode into contact with a top surface of the cover layer; and applying a voltage between the top electrode and a bottom electrode located below the cover layer and comprised in a material stack between the bottom of the carrier and the cover layer, creating an electric field in the cover layer, thereby poling the cover layer such that a dielectric constant of the cover layer in a direction perpendicular to the sensing array is higher than a dielectric constant in a direction parallel to the sensing array, thereby forming a cover layer having an anisotropic dielectric constant.
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