Integrated magnetic device with variable inductance and method for making such a device
Abstract:
Method for producing an integrated magnetic device with variable inductance, comprising: a) making of a piezoelectric element on a first substrate; b) making of a first electrically conductive element on a face of the piezoelectric element, and fastening of the ends of the piezoelectric element to a second substrate such that the piezoelectric element is arranged facing a cavity formed between the second substrate and the piezoelectric element, the first electrically conductive element being arranged in and/or against the second substrate or against the piezoelectric element; c) removing of the first substrate; d) making of a second electrically conductive element on another face of the piezoelectric element; and further comprising the making of an electrical and/or magnetic coupling of the first and second electrically conductive elements, and the making of a magnetic element arranged against and/or in the piezoelectric element and between the electrically conductive elements.
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