Invention Grant
- Patent Title: Member and plasma processing apparatus
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Application No.: US15989324Application Date: 2018-05-25
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Publication No.: US11037763B2Publication Date: 2021-06-15
- Inventor: Yuki Sugawara , Masanori Asahara , Masafumi Urakawa
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JPJP2017-109968 20170602
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
There is provision of a member used in a plasma processing apparatus configured to generate plasma from a gas in a processing vessel and to process a substrate disposed on a mounting base in the processing vessel using the plasma. The member includes a surface exposed to the plasma in the processing vessel in a state installed in the processing vessel, and a coating layer including cobalt which covers a part of the surface.
Public/Granted literature
- US20180350567A1 MEMBER AND PLASMA PROCESSING APPARATUS Public/Granted day:2018-12-06
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