Invention Grant
- Patent Title: Fabrication methods of patterned metal film layer, thin film transistor and display substrate
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Application No.: US16657062Application Date: 2019-10-18
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Publication No.: US11037801B2Publication Date: 2021-06-15
- Inventor: Jingang Fang , Luke Ding , Jun Liu , Wei Li , Yang Zhang , Leilei Cheng , Dongfang Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201811230086.1 20181022
- Main IPC: H01L21/32
- IPC: H01L21/32 ; H01L21/02 ; H01L21/3213 ; H01L21/027 ; H01L21/28 ; H01L21/285

Abstract:
A fabrication method of a patterned metal film layer, including: sequentially depositing a first metal layer and a photoresist on a substrate; forming a first patterned photoresist in the photoresist retaining area; etching the first metal layer, and removing a part of the first metal layer having a first thickness and located in an edge area of the photoresist retaining area and in the photoresist removing area, to form a second metal layer; processing the first patterned photoresist to form a second patterned photoresist; etching and removing a part, which is not in contact with the second patterned photoresist, of the second metal layer on the substrate to form a patterned metal film layer.
Information query
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