Invention Grant
- Patent Title: Method for a transfer print between substrates
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Application No.: US15601222Application Date: 2017-05-22
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Publication No.: US11037812B2Publication Date: 2021-06-15
- Inventor: Ralf Lerner , Oliver Haluch
- Applicant: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Applicant Address: DE Erfurt
- Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Current Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Current Assignee Address: DE Erfurt
- Agency: Greenberg Traurig LLP
- Priority: DE102016109459.5 20160523
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/683 ; B81C99/00 ; H01L25/065 ; H01L25/00

Abstract:
The transfer of devices or device components from a carrier substrate to a further carrier substrate or to a plurality of further carrier substrates can be performed with little effort (few transfer steps) to the at least one further carrier substrate. The method comprises producing first devices on the first carrier substrate in a two-dimensional grid. It comprises defining positions on the second carrier substrate on the basis of the two-dimensional grid for at least some of the first devices. It comprises releasing a plurality of the first devices from the first carrier substrate while maintaining the two-dimensional grid. Finally, the plurality of first devices are applied to the second carrier substrate in the defined positions while maintaining the two-dimensional grid or a multiple thereof in at least one of the two directions.
Public/Granted literature
- US20180040501A1 METHOD AND COMPONENT-ARRANGEMENT FOR A TRANSFER PRINT BETWEEN SUBSTRATES Public/Granted day:2018-02-08
Information query
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