Invention Grant
- Patent Title: Chip bonding device and bonding method thereof
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Application No.: US16312834Application Date: 2017-06-22
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Publication No.: US11037900B2Publication Date: 2021-06-15
- Inventor: Song Guo , Jianqi Sun , Feibiao Chen , Yuebin Zhu , Tianming Wang , Hai Xia
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201610470114.1 20160623
- International Application: PCT/CN2017/089505 WO 20170622
- International Announcement: WO2017/219997 WO 20171228
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L23/00 ; H01L21/67 ; H01L21/68 ; H01L21/687

Abstract:
A chip bonding apparatus and method are disclosed. The chip bonding apparatus includes: at least one separation module for separating chips; at least one bonding module for bonding the chips a substrate; a transportation device for transporting the chips between the separation module and the bonding module, the transportation device including one or more guide tracks and one or more transportation carriers for retaining the chips, each of the guide tracks is provided thereon with at least one of the transportation carriers; and a control device for individually controlling the separation module, the bonding module and the transportation device. The chip bonding apparatus and method allows pickup, transportation and chip-to-substrate bonding of chips in batches with increased chip bonding yield and improved chip bonding accuracy.
Public/Granted literature
- US20190164930A1 A CHIP BONDING DEVICE AND BONDING METHOD THEREOF Public/Granted day:2019-05-30
Information query
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