Invention Grant
- Patent Title: Three-dimensional memory device having on-pitch drain select gate electrodes and method of making the same
-
Application No.: US16406283Application Date: 2019-05-08
-
Publication No.: US11037943B2Publication Date: 2021-06-15
- Inventor: Muneyuki Imai , James Kai
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; G11C16/04 ; H01L29/06 ; H01L21/28

Abstract:
An array of memory stack structures extends through an alternating stack of insulating layers and electrically conductive layers. The drain-select-level assemblies may be provided by forming drain-select-level openings through a drain-select-level sacrificial material layer, and by forming a combination of a cylindrical electrode portion and a first gate dielectric mayin each first drain-select-level opening while forming a second gate dielectric directly on a sidewall of each second drain-select-level opening in a second subset of the drain-select-level openings. A strip electrode portion is formed by replacing the drain-select-level sacrificial material layer with a conductive material. Structures filling the second subset of the drain-select-level openings may be used as dummy structures at a periphery of an array. The dummy structures are free of gate electrodes and thus prevents a leakage current therethrough.
Public/Granted literature
Information query
IPC分类: