Invention Grant
- Patent Title: Semiconductor memory device, semiconductor device, and method of manufacturing semiconductor device
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Application No.: US16505111Application Date: 2019-07-08
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Publication No.: US11037950B2Publication Date: 2021-06-15
- Inventor: Seok-Cheon Baek
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2018-0082208 20180716
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11524 ; H01L27/11556 ; H01L27/11582 ; H01L23/522 ; H01L23/528 ; H01L21/311 ; H01L21/28 ; H01L21/768 ; H01L27/11548 ; G11C16/26 ; G11C16/04 ; G11C16/08

Abstract:
A semiconductor memory device includes a substrate including a cell region on which memory sells are disposed and a connection region on which conductive patterns are disposed, the conductive patterns electrically connected to the memory cells; a first word line stack including a plurality of first word lines that are stacked on the substrate in the cell region and extend to the connection region; a second word line stack including a plurality of second word lines that are stacked on the substrate in the cell region and extend to the connection region, the second word line stack being adjacent to the first word line stack; vertical channels disposed on the cell region of the substrate, the vertical channels being connected to the substrate and respectively coupled with the plurality of first and second word lines; a bridge connecting one of the plurality of first word lines in the first word line stack to a corresponding word line of the second word line stack.
Public/Granted literature
- US20200020702A1 SEMICONDUCTOR MEMORY DEVICE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2020-01-16
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