Invention Grant
- Patent Title: Method to form memory cells separated by a void-free dielectric structure
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Application No.: US16887232Application Date: 2020-05-29
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Publication No.: US11037990B2Publication Date: 2021-06-15
- Inventor: Hsia-Wei Chen , Wen-Ting Chu , Yu-Wen Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/24 ; H01L27/11507 ; H01L45/00 ; H01L43/12 ; H01L27/22

Abstract:
Various embodiments of the present application are directed towards an integrated chip comprising memory cells separated by a void-free dielectric structure. In some embodiments, a pair of memory cell structures is formed on a via dielectric layer, where the memory cell structures are separated by an inter-cell area. An inter-cell filler layer is formed covering the memory cell structures and the via dielectric layer, and further filling the inter-cell area. The inter-cell filler layer is recessed until a top surface of the inter-cell filler layer is below a top surface of the pair of memory cell structures and the inter-cell area is partially cleared. An interconnect dielectric layer is formed covering the memory cell structures and the inter-cell filler layer, and further filling a cleared portion of the inter-cell area.
Public/Granted literature
- US20200295085A1 METHOD TO FORM MEMORY CELLS SEPARATED BY A VOID-FREE DIELECTRIC STRUCTURE Public/Granted day:2020-09-17
Information query
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