Invention Grant
- Patent Title: Metal-insulator-metal capacitors including nanofibers
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Application No.: US16667037Application Date: 2019-10-29
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Publication No.: US11038011B2Publication Date: 2021-06-15
- Inventor: Lili Cheng , Robert J. Fox, III , Luke England
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L21/337
- IPC: H01L21/337 ; H01L29/66 ; H01L49/02 ; H01L51/50 ; H01L51/42
Abstract:
Methods of fabricating a structure for a metal-insulator-metal (MIM) capacitor. Conductive nanofibers are formed on a surface of a conductor layer. Each conductive nanofiber is terminated by an enlarged tip portion opposite the surface of the conductor layer. The enlarged tip portion is removed from each conductive nanofiber. The MIM capacitor may include the conductive nanofibers as portions of an electrode.
Public/Granted literature
- US20210126086A1 METAL-INSULATOR-METAL CAPACITORS INCLUDING NANOFIBERS Public/Granted day:2021-04-29
Information query
IPC分类:
