Invention Grant
- Patent Title: Sawtooh electric field drift region structure for planar and trench power semiconductor devices
-
Application No.: US16888768Application Date: 2020-05-31
-
Publication No.: US11038037B2Publication Date: 2021-06-15
- Inventor: Madhur Bobde , Lingpeng Guan , Anup Bhalla , Hamza Yilmaz
- Applicant: Alpha and Omega Semiconductor Incorporated
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee Address: US CA Sunnyvale
- Agent Bo-In Lin
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/808 ; H01L29/06 ; H01L27/07 ; H01L29/78

Abstract:
A lateral super junction JFET is formed from stacked alternating P type and N type semiconductor layers over a P-epi layer supported on an N+ substrate. An N+ drain column extends down through the super junction structure and the P-epi to connect to the N+ substrate to make the device a bottom drain device. N+ source column and P+ gate column extend through the super junction but stop at the P-epi layer. A gate-drain avalanche clamp diode is formed from the bottom the P+ gate column through the P-epi to the N+ drain substrate.
Public/Granted literature
- US20200303513A1 SAWTOOH ELECTRIC FIELD DRIFT REGION STRUCTURE FOR PLANAR AND TRENCH POWER SEMICONDUCTOR DEVICES Public/Granted day:2020-09-24
Information query
IPC分类: