Invention Grant
- Patent Title: Magnetic structures with tapered edges
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Application No.: US16576242Application Date: 2019-09-19
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Publication No.: US11038097B2Publication Date: 2021-06-15
- Inventor: Bruce B. Doris , Oscar van der Straten , Alexander Reznicek , Praneet Adusumilli
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12 ; H01F10/32 ; H01F41/14 ; H01F41/12

Abstract:
Magnetic structures including magnetic inductors and magnetic tunnel junction (MTJ)-containing structures that have tapered sidewalls are formed without using an ion beam etch (IBE). The magnetic structures are formed by providing a material stack of a dielectric capping layer and a sacrificial dielectric material layer above a lower interconnect level. First and second etching steps are performed to pattern the sacrificial dielectric material layer and the dielectric capping layer such that a patterned dielectric capping layer is provided with a tapered sidewall. After removing the sacrificial dielectric material layer, a magnetic material-containing stack is formed within the opening in the patterned dielectric capping layer and atop the patterned dielectric capping layer. A planarization process is then employed to pattern the magnetic-containing stack by removing the magnetic material-containing stack that is located atop the patterned dielectric capping layer.
Public/Granted literature
- US20210091300A1 MAGNETIC STRUCTURES WITH TAPERED EDGES Public/Granted day:2021-03-25
Information query
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