- Patent Title: Resistive memory crossbar array with top electrode inner spacers
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Application No.: US16818550Application Date: 2020-03-13
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Publication No.: US11038104B2Publication Date: 2021-06-15
- Inventor: Takashi Ando , Hiroyuki Miyazoe , Iqbal R. Saraf , Shyng-Tsong Chen
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method is presented for protecting resistive random access memory (RRAM) stacks within a resistive memory crossbar array. The method includes forming conductive lines within an interlayer dielectric (ILD), forming a metal nitride layer over at least one conductive line, forming a bottom electrode, forming a RRAM stack over the metal nitride layer, the RRAM stack including a first top electrode and a second top electrode, undercutting the second top electrode to define recesses, and filling the recesses with inner spacers.
Public/Granted literature
- US20200220078A1 RESISTIVE MEMORY CROSSBAR ARRAY WITH TOP ELECTRODE INNER SPACERS Public/Granted day:2020-07-09
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