Waste fluid treatment apparatus
Abstract:
A waste fluid treatment apparatus removing processing debris from a processing waste fluid discharged from a processing apparatus. The waste fluid treatment apparatus includes a fluid bath storing the processing waste fluid, an inflow port through which the processing waste fluid is introduced to the fluid bath, a collecting area having an inclined surface for depositing the processing debris at a predetermined portion of a bottom of the fluid bath in a concentrated manner, a vacuum pump discharging the processing debris deposited in the collecting area to an outside of the fluid bath, and an outflow port through which a processing waste fluid obtained by removing the processing debris is discharged.
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