Invention Grant
- Patent Title: Method for direct patterned growth of atomic layer metal dichalcogenides with pre-defined width
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Application No.: US16290407Application Date: 2019-03-01
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Publication No.: US11041236B2Publication Date: 2021-06-22
- Inventor: Avetik Harutyunyan
- Applicant: HONDA MOTOR CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: HONDA MOTOR CO., LTD.
- Current Assignee: HONDA MOTOR CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Arent Fox LLP
- Main IPC: C23C16/04
- IPC: C23C16/04 ; H01L21/02 ; C23C16/30

Abstract:
A method of growing patterns of an atomic layer of metal dichalcogenides, the method including providing a substrate, providing aligned patterns of carbon nanostructures on the substrate, providing a first metal portion in contact with a first portion of the patterns of carbon nanostructures and a second metal portion in contact with a second portion of the patterns of carbon nanostructures, depositing a salt layer on the substrate and the patterns of carbon nanostructures, resistively heating the patterns of carbon nanostructures to remove the patterns of carbon nanostructures and salt deposited thereon from the substrate, wherein removing the patterns of carbon nanostructures and salt deposited thereon from the substrate provides salt patterns on the substrate, and growing an atomic layer of metal dichalcogenides on the salt patterns, wherein the atomic layer of metal dichalcogenides is provided in aligned patterns each having a pre-defined width. Also disclosed are patterns of an atomic layer of metal dichalcogenides prepared according to the method of the disclosure.
Public/Granted literature
- US20200277699A1 METHOD FOR DIRECT PATTERNED GROWTH OF ATOMIC LAYER METAL DICHALCOGENIDES WITH PRE-DEFINED WIDTH Public/Granted day:2020-09-03
Information query
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