Invention Grant
- Patent Title: Semi-insulating silicon carbide crystalline ingot having a resistivity larger than 10∧7 Ohm-cm and manufacturing method therefor
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Application No.: US16450930Application Date: 2019-06-24
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Publication No.: US11041255B2Publication Date: 2021-06-22
- Inventor: Ching-Shan Lin , Jian-Hsin Lu , Chien-Cheng Liou , I-Ching Li
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Li & Cai Intellectual Property Office
- Priority: TW107145264 20181214
- Main IPC: C30B25/20
- IPC: C30B25/20 ; C30B29/36 ; C30B25/16

Abstract:
A silicon carbide crystal and a manufacturing method thereof are provided. The silicon carbide crystal includes an N-type seed layer, a barrier layer, and a semi-insulating ingot, which are sequentially stacked and are made of silicon carbide. The N-type seed layer has a resistivity within a range of 0.01-0.03 Ω·cm. The barrier layer includes a plurality of epitaxial layers sequentially formed on the N-type seed layer by an epitaxial process. The C/Si ratios of the epitaxial layers gradually increase in a growth direction away from the N-type seed layer. A nitrogen concentration of the silicon carbide crystal gradually decreases from the N-type seed layer toward the semi-insulating ingot by a diffusion phenomenon, so that the semi-insulating crystal has a resistivity larger than 107 Ω·cm.
Information query
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