Invention Grant
- Patent Title: Elastomeric seal
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Application No.: US16099230Application Date: 2016-05-06
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Publication No.: US11041567B2Publication Date: 2021-06-22
- Inventor: Murat Gulcur , Christopher Julian Thornton , Paul Andrew Haworth , John Edward Kerwin
- Applicant: PRECISION POLYMER ENGINEERING LTD.
- Applicant Address: GB Blackburn
- Assignee: PRECISION POLYMER ENGINEERING LTD.
- Current Assignee: PRECISION POLYMER ENGINEERING LTD.
- Current Assignee Address: GB Blackburn
- Agency: Tucker Ellis LLP
- Agent Michael G. Craig; Heather M. Barnes
- International Application: PCT/GB2016/051305 WO 20160506
- International Announcement: WO2017/191425 WO 20171109
- Main IPC: F16J15/12
- IPC: F16J15/12 ; F16J15/10 ; H01L21/67 ; C23C16/44 ; C09D11/037 ; C09D11/101 ; C09D11/107
Abstract:
An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
Public/Granted literature
- US20190154155A1 AN ELASTOMERIC SEAL Public/Granted day:2019-05-23
Information query
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