Invention Grant
- Patent Title: Tunable Fabry-Perot filter element, spectrometer device and method for manufacturing a tunable Fabry-Perot filter element
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Application No.: US16703428Application Date: 2019-12-04
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Publication No.: US11041757B2Publication Date: 2021-06-22
- Inventor: Thoralf Kautzsch
- Applicant: Infineon Technologies Dresden GmbH & Co. KG
- Applicant Address: DE Dresden
- Assignee: Infineon Technologies Dresden GmbH & Co. KG
- Current Assignee: Infineon Technologies Dresden GmbH & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Slater Matsil, LLP
- Priority: EP19152623 20190118
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01J3/26 ; G02B26/00

Abstract:
A tunable Fabry-Perot (FP) filter element includes a first FP filter stack arranged at a movable first carrier element, and a second FP filter stack arranged in an opposing configuration to the first FP filter stack at a second carrier element, wherein, upon an actuation, the first carrier element with the first FP filter stack is vertically movable with respect to the second carrier element with the second FP filter stack, for adjusting the distance between the first and second opposing FP filter stack and wherein the movable first carrier element is formed as an SON structure (SON=silicon-on-nothing) in an SON substrate, wherein the SON structure is movable suspended by means of a mechanical spring element to the SON substrate.
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