Measuring apparatus
Abstract:
Utilizing a load generated by a non-linear spring, a spring constant of which increases as an amount of deformation increases, a measuring apparatus presses an indenter against a material surface and evaluates material characteristics. The measuring apparatus includes: an actuator that causes the non-linear spring to deform; a scale that measures the amount of deformation of the non-linear spring when the non-linear spring is deformed; and a controller that stores non-linear spring characteristic data for reciprocally calculating the amount of deformation and the load, and that drives the actuator based on the amount of deformation and the non-linear spring characteristic data such that the load reaches a target load.
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