Invention Grant
- Patent Title: Solid-state imaging element, manufacturing method, and electronic device
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Application No.: US15753415Application Date: 2016-08-24
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Publication No.: US11041980B2Publication Date: 2021-06-22
- Inventor: Kenichi Kajihara
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Chip Law Group
- Priority: JPJP2015-175387 20150907
- International Application: PCT/JP2016/074580 WO 20160824
- International Announcement: WO2017/043308 WO 20170316
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G02B5/20 ; H04N9/04

Abstract:
The present disclosure relates to a solid-state imaging element, a manufacturing method, and an electronic device capable of further improving quality. A flattening film is formed so as to fill a recessed portion of a semiconductor substrate having a pixel region in which a plurality of pixels is arranged in an array, a recessed region is formed in the flattening film by hollowing out a region corresponding to the pixel region, and a color filter layer is formed in the recessed region. In addition, an on-chip lens layer is formed on a plane including the flattening film and the color filter layer. The present technology is applicable, for example, to a CMOS image sensor.
Public/Granted literature
- US20180240829A1 SOLID-STATE IMAGING ELEMENT, MANUFACTURING METHOD, AND ELECTRONIC DEVICE Public/Granted day:2018-08-23
Information query
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