Invention Grant
- Patent Title: Hinge for micro and nanoelectromechanical systems with out-of-plane displacement and reduced non-linearity
-
Application No.: US16721578Application Date: 2019-12-19
-
Publication No.: US11041992B2Publication Date: 2021-06-22
- Inventor: Samer Dagher , Loic Joet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1873561 20181220
- Main IPC: H04R19/04
- IPC: H04R19/04 ; G02B6/35 ; G02B26/08 ; G02B27/56

Abstract:
A hinge between a first part and a second part of a microelectromechanical system including a first element and a second element free to move relative to each other in an out-of-plane direction is disclosed. The hinge includes a first rigid part; a second part fixed to a first face of the first part by one end and anchored to the second element by a second end, the second part deforming in bending in the out-of-plane direction; and a third part fired to a first face of the first part by a second end, and anchored to the first element by a second end, the third part deforming in bending in the out-of-plane direction. In an undeformed state, the second part and the third part each includes one face located in the same plane orthogonal to the out-of-plane direction.
Information query