Invention Grant
- Patent Title: Sample analyzer and sample analysis method
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Application No.: US16113920Application Date: 2018-08-27
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Publication No.: US11043369B2Publication Date: 2021-06-22
- Inventor: Akira Kuramoto , Teruyuki Kinno
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2018-044494 20180312
- Main IPC: H01J49/16
- IPC: H01J49/16

Abstract:
A sample analyzer includes a voltage source that applies a voltage to a sample. A laser irradiator irradiates the sample with a laser beam. A detector detects a particle emitted from the sample. An operation device specifies the material of the particle detected by the detection device, by mass spectrometry of the particle and analyzes the structure of the sample. The operation device calculates a ratio in structure between model information indicating the structure of the sample, which is prepared in advance, and analysis information indicating the structure of the sample, which is obtained by the mass spectrometry, and applies the ratio to the analysis information so as to correct the analysis information.
Public/Granted literature
- US20190279855A1 SAMPLE ANALYZER AND SAMPLE ANALYSIS METHOD Public/Granted day:2019-09-12
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