Invention Grant
- Patent Title: Movable and removable process kit
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Application No.: US16222831Application Date: 2018-12-17
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Publication No.: US11043400B2Publication Date: 2021-06-22
- Inventor: Andreas Schmid , Denis M. Koosau
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/3065 ; H01L21/687 ; C23C16/52 ; H01J37/32
Abstract:
Aspects of the present disclosure generally relate to methods and apparatuses for adjusting an edge ring position, and for removing or replacing one or more components of a process kit of a process chamber. The process kit includes one or more of an edge ring, a support ring, a sliding ring, and other consumable or degradable components.
Public/Granted literature
- US20200234981A1 MOVABLE AND REMOVABLE PROCESS KIT Public/Granted day:2020-07-23
Information query
IPC分类:
