Invention Grant
- Patent Title: Middle of the line self-aligned direct pattern contacts
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Application No.: US16685648Application Date: 2019-11-15
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Publication No.: US11043418B2Publication Date: 2021-06-22
- Inventor: Jason E. Stephens , Daniel Chanemougame , Ruilong Xie , Lars W. Liebmann , Gregory A. Northrop
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/528 ; H01L23/522

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to middle of the line self-aligned direct pattern contacts and methods of manufacture. The structures described herein include: at least one gate structure with a metallization and source/drain regions; a source/drain contact in electrical connection with the source/drain regions, respectively; and a contact structure with a re-entrant profile in electrical connection with the source/drain contact and the metallization of the at least one gate structure, respectively.
Public/Granted literature
- US20200083102A1 MIDDLE OF THE LINE SELF-ALIGNED DIRECT PATTERN CONTACTS Public/Granted day:2020-03-12
Information query
IPC分类: