Invention Grant
- Patent Title: Three-dimensional phase change memory device including vertically constricted current paths and methods of manufacturing the same
-
Application No.: US16440250Application Date: 2019-06-13
-
Publication No.: US11043537B2Publication Date: 2021-06-22
- Inventor: Yuji Takahashi , Masatoshi Nishikawa , Wei Kuo Shih
- Applicant: WESTERN DIGITAL TECHNOLOGIES, INC.
- Applicant Address: US CA San Jose
- Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
- Current Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
- Current Assignee Address: US CA San Jose
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. Memory openings are formed through the alternating stack. Protruding tip portions are formed on each of the sacrificial material layers around the memory openings. A plurality of insulating spacers is formed within each memory opening between each vertically neighboring pair of tip portions of the sacrificial material layers. A phase change memory material and a vertical bit line are formed within each of the memory openings. The phase change memory material can be formed as a vertical stack of discrete annular phase change memory material portions, or can be formed as a continuous phase change memory material layer. Each of the sacrificial material layer can be replaced by an electrically conductive layer.
Information query
IPC分类: