Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16697203Application Date: 2019-11-27
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Publication No.: US11043582B2Publication Date: 2021-06-22
- Inventor: Tatsuya Naito
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kanagawa
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kanagawa
- Priority: JPJP2017-240064 20171214
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L27/06

Abstract:
Provided is a semiconductor device comprising: a semiconductor substrate; a gate trench section that is provided from an upper surface to an inside of the semiconductor substrate and extends in a predetermined extending direction on the upper surface of the semiconductor substrate; a mesa section in contact to the gate trench section in an arrangement direction orthogonal the extending direction; and an interlayer dielectric film provided above the semiconductor substrate; wherein the interlayer dielectric film is provided above at least a part of the gate trench section in the arrangement direction; a contact hole through which the mesa section is exposed is provided to the interlayer dielectric film; and a width of the contact hole in the arrangement direction is equal to or greater than a width of the mesa section in the arrangement direction.
Public/Granted literature
- US20200098905A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-03-26
Information query
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