Piezoelectric driving device, electronic-component conveying apparatus, and robot
Abstract:
A piezoelectric driving device includes a supporting section, a first moving section movable in a first direction relative to the supporting section, a second moving section movable in a second direction relative to the first moving section, a first driving section configured to drive a first piezoelectric actuator to move the first moving section relative to the supporting section and stop the first piezoelectric actuator to hold the first moving section on the supporting section, and a second driving section configured to drive a second piezoelectric actuator to move the second moving section relative to the first moving section and stop the second piezoelectric actuator to hold the second moving section on the first moving section. A first holding force for holding the first moving section on the supporting section and a second holding force for holding the second moving section on the first moving section are different from each other.
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