- Patent Title: Semiconductor memory device having chip-to-chip bonding structure
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Application No.: US16724006Application Date: 2019-12-20
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Publication No.: US11049776B2Publication Date: 2021-06-29
- Inventor: Seung Ho Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2019-0107213 20190830
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/00 ; H01L21/68 ; G11C16/06 ; H01L23/544

Abstract:
A semiconductor memory device includes a first chip having a first pad and a first misalignment detection pattern on a first surface; and a second chip having a second pad and a second misalignment detection pattern on a second surface, and bonded to the first surface of the first chip such that the second pad is coupled with the first pad. The second chip includes a misalignment detection circuit which is coupled between the second misalignment detection pattern and a test pad and outputs a first voltage provided from the first misalignment detection pattern, to the test pad, in the case where a misalignment between the first chip and the second chip exceeds a preset value such that the first misalignment detection pattern and the second misalignment detection pattern are shorted to each other.
Public/Granted literature
- US20210066143A1 SEMICONDUCTOR MEMORY DEVICE HAVING CHIP-TO-CHIP BONDING STRUCTURE Public/Granted day:2021-03-04
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