Invention Grant
- Patent Title: Transistor comprising a matrix of nanowires and methods of making such a transistor
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Application No.: US16574763Application Date: 2019-09-18
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Publication No.: US11049934B2Publication Date: 2021-06-29
- Inventor: Ali Razavieh , Julien Frougier , Bradley Morgenfeld
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/06 ; H01L29/423 ; H01L29/08 ; H01L29/10 ; H01L29/66 ; H01L21/02 ; H01L21/306 ; H01L21/762 ; H01L29/786 ; H01L21/321 ; H01L21/3105

Abstract:
One illustrative transistor device disclosed herein includes a nanowire matrix comprising a plurality of nanowire structures that are arranged in at least one substantially horizontally oriented row and at least two substantially vertically oriented columns, the at least two substantially vertically oriented columns being laterally spaced apart from one another in a gate width direction of the transistor device, each of the plurality of nanowire structures comprising an outer perimeter. This illustrative embodiment of the transistor device further includes a gate structure that is positioned around the outer perimeter of all of the nanowire structures in the matrix, and a gate cap positioned above the gate structure.
Public/Granted literature
- US20210083049A1 TRANSISTOR COMPRISING A MATRIX OF NANOWIRES AND METHODS OF MAKING SUCH A TRANSISTOR Public/Granted day:2021-03-18
Information query
IPC分类: