Invention Grant
- Patent Title: High ruggedness heterojunction bipolar transistor structure
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Application No.: US16292365Application Date: 2019-03-05
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Publication No.: US11049936B2Publication Date: 2021-06-29
- Inventor: Yu-Chung Chin , Chao-Hsing Huang , Min-Nan Tseng , Kai-Yu Chen
- Applicant: VISUAL PHOTONICS EPITAXY CO., LTD.
- Applicant Address: TW Taoyuan
- Assignee: VISUAL PHOTONICS EPITAXY CO., LTD.
- Current Assignee: VISUAL PHOTONICS EPITAXY CO., LTD.
- Current Assignee Address: TW Taoyuan
- Agency: Amin, Turocy & Watson, LLP
- Priority: TW107141339 20181120
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L21/00 ; H01L29/08 ; H01L29/205 ; H01L29/737 ; H01L27/082 ; H01L29/732

Abstract:
The disclosure provides a high ruggedness HBT structure, including: a sub-collector layer on a substrate and formed of an N-type III-V semiconductor material; a collector layer on the sub-collector layer and formed of a III-V semiconductor material; a base layer on the collector layer and formed of a P-type III-V semiconductor material; an emitter layer on the base layer and formed of one of N-type semiconductor materials of InGaP, InGaAsP and InAlGaP; a first emitter cap layer on the emitter layer and formed of one of undoped or N-type semiconductor materials of AlxGa1-xAs, AlxGa1-xAs1-yNy, AlxGa1-xAs1-zPz, AlxGa1-xAs1-wSbw, and InrAlxGa1-x-rAs, x having a highest value between 0.05≤x≤0.4, and y, z, r, w≤0.1; a second emitter cap layer on the first emitter cap layer and formed of an N-type III-V semiconductor material; and an ohmic contact layer on the second emitter cap layer and formed of an N-type III-V semiconductor material.
Public/Granted literature
- US20200161421A1 HIGH RUGGEDNESS HETEROJUNCTION BIPOLAR TRANSISTOR STRUCTURE Public/Granted day:2020-05-21
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