Invention Grant
- Patent Title: Method for forming III-nitride semiconductor device and the III-nitride semiconductor device
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Application No.: US16228878Application Date: 2018-12-21
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Publication No.: US11049943B2Publication Date: 2021-06-29
- Inventor: Xian-Feng Ni , Qian Fan , Wei He
- Applicant: Suzhou Han Hua Semiconductor Co.,Ltd
- Applicant Address: CN Suzhou
- Assignee: Suzhou Han Hua Semiconductor Co.,Ltd
- Current Assignee: Suzhou Han Hua Semiconductor Co.,Ltd
- Current Assignee Address: CN Suzhou
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: CN201811281410.2 20181031
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L21/311 ; H01L29/66 ; H01L29/778

Abstract:
The present disclosure includes but is not limited to the III-Nitride semiconductor devices including a barrier layer, a gallium nitride or indium gallium nitride channel layer having a Ga-face coupled with the barrier layer, and a patterned thermoconductive layer having a thermal conductivity of at least 500 W/(m-K) within 1000 nanometers of a Ga-face of the gallium nitride channel layer. The semiconductor device may be a high-electron-mobility transistor or a semiconductor wafer. Methods for making the same also are described.
Public/Granted literature
- US20200052076A1 Method for Forming III-Nitride Semiconductor Device and the III-Nitride Semiconductor Device Public/Granted day:2020-02-13
Information query
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