Invention Grant
- Patent Title: Silicon carbide semiconductor device
-
Application No.: US16806712Application Date: 2020-03-02
-
Publication No.: US11049964B2Publication Date: 2021-06-29
- Inventor: Tsuyoshi Araoka
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Rabin & Berdo, P.C.
- Priority: JPJP2019-077328 20190415
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/16 ; H01L29/423 ; H01L29/06

Abstract:
A first portion of the poly-silicon layer is provided on a first face of a front surface of a semiconductor substrate via a gate insulating film in an edge termination region and configures a gate runner. The first portion opposes an edge p++-type contact region in a depth direction Z. A chip-end-side edge of the first portion is positioned within a plane of the edge p++-type contact region. A field oxide film disposed separated from the poly-silicon layer, extends from a chip end toward a chip center and, on the first face, terminates closer to the chip end than does the first portion. The entire surface of the poly-silicon layer is flat, free of a step due to the field oxide film. A chip-center-side edge of the field oxide film is closer to the chip end than is the edge p++-type contact region and positioned on a p-type base region.
Public/Granted literature
- US20200328301A1 SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2020-10-15
Information query
IPC分类: