Invention Grant
- Patent Title: Micro panchromatic QLED array device based on quantum dot transfer process of deep silicon etching templates, and preparation method therefor
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Application No.: US17044057Application Date: 2019-11-11
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Publication No.: US11050004B2Publication Date: 2021-06-29
- Inventor: Bin Liu , Di Jiang , Junchi Yu , Xuan Wang , Danfeng Pan , Zili Xie , Yugang Zhou , Dunjun Chen , Xiangqian Xiu , Rong Zhang
- Applicant: NANJING UNIVERSITY
- Applicant Address: CN Nanjing
- Assignee: NANJING UNIVERSITY
- Current Assignee: NANJING UNIVERSITY
- Current Assignee Address: CN Nanjing
- Agency: Bayramoglu Law Offices LLC
- Priority: CN201910278874.6 20190409
- International Application: PCT/CN2019/116991 WO 20191111
- International Announcement: WO2020/207009 WO 20201015
- Main IPC: H01L33/50
- IPC: H01L33/50 ; H01L33/00 ; H01L33/32 ; H01L33/40

Abstract:
A micro panchromatic QLED array device based on a quantum dot transfer process of deep silicon etching templates. Array-type square table structures pass through a p-type GaN layer and a quantum well active layer and are deep to an n-type GaN layer are disposed on a blue LED epitaxial wafer, wherein micro holes are formed through etching in the structures. Every 2*2 table structures constitute an RGB pixel unit. Among the four micro holes, three of the holes are filled with red light, green light and yellow light quantum dots respectively, and one of the holes emits blue light/is filled with a blue light quantum dot. Micro holes in a silicon wafer are formed through etching with a deep silicon etching technology; the micro holes in the silicon wafer are aligned with quantum dot filling areas on a micro-LED.
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