Invention Grant
- Patent Title: Piezoelectric acoustic MEMS transducer and fabrication method thereof
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Application No.: US16813477Application Date: 2020-03-09
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Publication No.: US11051113B2Publication Date: 2021-06-29
- Inventor: Fabrizio Cerini , Silvia Adorno , Federico Vercesi
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102018000004758 20180420
- Main IPC: H04R17/02
- IPC: H04R17/02 ; B81B3/00 ; B81C1/00 ; H01L41/113

Abstract:
A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.
Public/Granted literature
- US20200221234A1 PIEZOELECTRIC ACOUSTIC MEMS TRANSDUCER AND FABRICATION METHOD THEREOF Public/Granted day:2020-07-09
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