Invention Grant
- Patent Title: Method and device for thermal insulation of micro-reactors
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Application No.: US13625247Application Date: 2012-09-24
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Publication No.: US11052387B2Publication Date: 2021-07-06
- Inventor: Ben Jones , Paolo Fiorini , Hiroyuki Tanaka
- Applicant: IMEC , Katholieke Universiteit Leuven, K.U. LEUVEN R&D , Panasonic Corporation
- Applicant Address: BE Leuven; BE Leuven; JP Osaka
- Assignee: IMEC,Katholieke Universiteit Leuven, K.U. LEUVEN R&D,Panasonic Corporation
- Current Assignee: IMEC,Katholieke Universiteit Leuven, K.U. LEUVEN R&D,Panasonic Corporation
- Current Assignee Address: BE Leuven; BE Leuven; JP Osaka
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP11182533 20110923
- Main IPC: C01B3/34
- IPC: C01B3/34 ; B01L3/00 ; B01L7/00 ; B81B3/00 ; B81B7/00
Abstract:
A micro-fluidic device is described. The micro-fluidic device includes a semiconductor substrate; at least one micro-reactor in the semiconductor substrate; one or more micro-fluidic channels in the semiconductor substrate, connected to the at least one micro-reactor; a cover layer bonded to the semiconductor substrate for sealing the one or more micro-fluidic channels; and at least one through-substrate trench surrounding the at least one micro-reactor and the one or more micro-fluidic channels.
Public/Granted literature
- US20130078155A1 Method and Device for Thermal Insulation of Micro-Reactors Public/Granted day:2013-03-28
Information query
