- Patent Title: Plasma erosion resistant rare-earth oxide based thin film coatings
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Application No.: US16685341Application Date: 2019-11-15
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Publication No.: US11053581B2Publication Date: 2021-07-06
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B32B18/00
- IPC: B32B18/00 ; C23C14/08 ; C23C14/22 ; H01J37/32 ; C23C14/34
Abstract:
An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Er2O3, Er3Al5O12, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Public/Granted literature
- US20200087776A1 PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS Public/Granted day:2020-03-19
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