Invention Grant
- Patent Title: Tin or tin alloy plating solution and bump forming method
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Application No.: US16768921Application Date: 2019-03-19
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Publication No.: US11053600B2Publication Date: 2021-07-06
- Inventor: Koji Tatsumi
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JPJP2018-052012 20180320,JPJP2018-057551 20180326,JPJP2019-040216 20190306
- International Application: PCT/JP2019/011349 WO 20190319
- International Announcement: WO2019/181906 WO 20190926
- Main IPC: C25D3/32
- IPC: C25D3/32 ; C25D3/60 ; C25D5/50 ; C25D7/12 ; H01L23/00

Abstract:
This tin or tin alloy plating solution includes a soluble salt including at least a stannous salt (A), an acid selected from an organic acid and an inorganic acid or a salt thereof (B), a surfactant (C), benzalacetone (D), and a solvent (E), wherein the plating solution is used to form a pattern in which bump diameters are different from each other on a base material, an amount of the benzalacetone (D) is 0.05 g/L to 0.2 g/L, a mass ratio (C/D) of the surfactant (C) to the benzalacetone (D) is 10 to 200, and a mass ratio (E/D) of the solvent (E) to the benzalacetone (D) is 10 or more.
Public/Granted literature
- US20210025069A1 TIN OR TIN ALLOY PLATING SOLUTION AND BUMP FORMING METHOD Public/Granted day:2021-01-28
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