Invention Grant
- Patent Title: Method of producing silicon single crystal, and silicon single crystal wafer
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Application No.: US16463537Application Date: 2017-11-13
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Publication No.: US11053606B2Publication Date: 2021-07-06
- Inventor: Kosei Sugawara , Ryoji Hoshi
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2016-238941 20161209
- International Application: PCT/JP2017/040698 WO 20171113
- International Announcement: WO2018/105317 WO 20180614
- Main IPC: C30B15/10
- IPC: C30B15/10 ; C30B15/20 ; C30B29/06

Abstract:
A method of producing a silicon single crystal, including pulling a silicon single crystal by Czochralski method while a magnetic field is applied to a raw material melt, including: setting a diameter on pulling the silicon single crystal to 300 mm or more, setting a growth axis direction of the silicon single crystal to , and growing the silicon single crystal so as to satisfy a relation of 1096/D−(0.134×M+80×R)/D>0.7, wherein D [mm] is the diameter on pulling the silicon single crystal, M [Gauss] is a central magnetic field strength at a surface of the raw material melt, and R [rpm] is a rotation rate of the silicon single crystal. This makes it possible to produce a crystal with favorable macroscopic RRG distribution and microscopic variation of resistivity.
Public/Granted literature
- US2123421A Hair curler Public/Granted day:1938-07-12
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