Invention Grant
- Patent Title: Method of suppressing false positive signals during self mixing interference particle detection
-
Application No.: US16680563Application Date: 2019-11-12
-
Publication No.: US11054244B2Publication Date: 2021-07-06
- Inventor: Okke Ouweltjes , Johannes Hendrikus Maria Spruit , Alexander Marc van der Lee , Petrus Theodorus Jutte
- Applicant: TRUMPF Photonic Components GmbH
- Applicant Address: DE Ulm
- Assignee: TRUMPF Photonic Components GmbH
- Current Assignee: TRUMPF Photonic Components GmbH
- Current Assignee Address: DE Ulm
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: EP17170761 20170512
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N15/02 ; G01N15/14 ; G01S7/4912

Abstract:
A method of measuring a particle density of particles includes emitting, by a laser, a laser beam directed to a mirror, redirecting the laser beam by the mirror with a predetermined periodic movement, and focusing the laser beam to a detection volume by an optical imaging device. The method further includes determining a self mixing interference signal of an optical wave within a laser cavity if the self mixing interference signal is generated by laser light of the laser beam reflected by at least one of the particles and suppressing a false self mixing interference signal for particle detection if the self mixing interference signal is caused by a disturbance in an optical path of the laser beam. The false self mixing signal caused by the disturbance in the optical path of the laser beam is suppressed in a defined range of angles of the mirror during the periodic movement.
Public/Granted literature
- US20200096314A1 METHOD OF SUPPRESSING FALSE POSITIVE SIGNALS DURING SELF MIXING INTERFERENCE PARTICLE DETECTION Public/Granted day:2020-03-26
Information query