Invention Grant
- Patent Title: Vibration type angular velocity sensor
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Application No.: US16708668Application Date: 2019-12-10
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Publication No.: US11054260B2Publication Date: 2021-07-06
- Inventor: Tomoya Jomori
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JPJP2017-122283 20170622
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; H01L41/08 ; H01L41/187

Abstract:
A vibration type angular velocity sensor includes a substrate having a surface; a plurality of fixation parts, a plurality of weights, two linear drive beams, a plurality of supporting members, a drive part and a detection part. The two linear drive beams are disposed on opposite sides of the weights in one direction so as to be connected to each other through the weights. The supporting members join the fixation parts to the drive beams. The drive part drives the drive beams to vibrate. The detection part generates an electric output according to displacement of the weights caused by an angular velocity applied thereto while the drive beams are being driven to vibrate. The fixation parts are disposed between the two linear drive beams.
Public/Granted literature
- US20200263991A1 VIBRATION TYPE ANGULAR VELOCITY SENSOR Public/Granted day:2020-08-20
Information query
IPC分类: