Invention Grant
- Patent Title: Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode
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Application No.: US16395542Application Date: 2019-04-26
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Publication No.: US11054439B2Publication Date: 2021-07-06
- Inventor: Christof Baur
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102016221319.9 20161028
- Main IPC: G01Q10/04
- IPC: G01Q10/04 ; G01Q10/06
Abstract:
The present invention relates to a scanning probe microscope having: (a) a scan unit embodied to scan a measuring probe over a sample surface in a step-in scan mode; and (b) a self-oscillation circuit arrangement configured to excite the measuring probe to a natural oscillation during the step-in scan mode.
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