Invention Grant
- Patent Title: Scanning probe microscope and position adjustment method for scanning probe microscope
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Application No.: US16995416Application Date: 2020-08-17
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Publication No.: US11054441B2Publication Date: 2021-07-06
- Inventor: Keita Fujino
- Applicant: Shimadzu Corporation
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Muir Patent Law, PLLC
- Priority: JPJP2019-185295 20191008
- Main IPC: G01Q20/02
- IPC: G01Q20/02

Abstract:
A laser beam adjustment unit adjusts a laser beam applied to a cantilever. Assuming that a direction of displacement of a spot of the laser beam on a light receiving surface when the cantilever is displaced during measurement of properties of a sample is defined as a first direction, and a direction orthogonal to the first direction on the light receiving surface is defined as a second direction, the laser beam adjustment unit adjusts the laser beam such that a length of the spot of the laser beam in the second direction during adjustment of a position of a detection unit is longer than a length of the spot of the laser beam in the first direction during measurement of the properties of the sample.
Public/Granted literature
- US20210102971A1 Scanning Probe Microscope and Position Adjustment Method for Scanning Probe Microscope Public/Granted day:2021-04-08
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