Invention Grant
- Patent Title: Soft error inspection method, soft error inspection apparatus, and soft error inspection system
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Application No.: US16683875Application Date: 2019-11-14
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Publication No.: US11054460B2Publication Date: 2021-07-06
- Inventor: Takeshi Soeda
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Fujitsu Patent Center
- Main IPC: G01R31/265
- IPC: G01R31/265 ; G01R31/307
Abstract:
A soft error inspection method for a semiconductor device includes: irradiating and scanning the semiconductor device with a laser beam or an electron beam; and measuring and storing a time of bit inversion for each of areas irradiated with the laser beam or the electron beam of the semiconductor device.
Public/Granted literature
- US20200081056A1 SOFT ERROR INSPECTION METHOD, SOFT ERROR INSPECTION APPARATUS, AND SOFT ERROR INSPECTION SYSTEM Public/Granted day:2020-03-12
Information query
