Invention Grant
- Patent Title: Learning processor, learning processing method, production method of compound semiconductor, and recording medium
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Application No.: US16520390Application Date: 2019-07-24
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Publication No.: US11054793B2Publication Date: 2021-07-06
- Inventor: Takaaki Furuya , Koichiro Ueno
- Applicant: Asahi Kasei Microdevices Corporation
- Applicant Address: JP Tokyo
- Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee Address: JP Tokyo
- Priority: JPJP2018-139848 20180725
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G06N5/04 ; G06N20/00

Abstract:
Provided is a learning processor including a base characteristic acquiring section that acquires base characteristic data indicating a characteristic of a base layer serving as a base on which a film is to be deposited by a film deposition apparatus; a film characteristic acquiring section that acquires film characteristic data indicating a characteristic of the film deposited on the base layer by the film deposition apparatus; and a first learning processing section that performs learning processing of a first model that outputs predicted film characteristic data obtained by predicting a characteristic of a film to be deposited by the film deposition apparatus based on targeted base characteristic data indicating a characteristic of a base layer serving as a target for formation of the film, using learning data that includes the base characteristic data and the film characteristic data.
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