Invention Grant
- Patent Title: Valve control apparatus and vacuum valve
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Application No.: US16738051Application Date: 2020-01-09
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Publication No.: US11054847B2Publication Date: 2021-07-06
- Inventor: Junichiro Kozaki
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JPJP2019-031724 20190225
- Main IPC: G05D16/02
- IPC: G05D16/02 ; F16K37/00 ; G05D16/20 ; F16K3/06 ; F16K51/02 ; F16K31/04 ; F16K3/02 ; G05D16/00

Abstract:
A valve control apparatus comprises: a generator configured to generate a first set pressure signal; and a valve opening controller configured to perform the first valve opening control on the basis of the target pressure and, after the first valve opening control, perform the second valve opening control performing feedback control on the basis of a difference between the first set pressure signal and the chamber pressure. The generator generates the first set pressure signal on the basis of a first set pressure locus converging from the chamber pressure at the time of switching from the first valve opening control to the second valve opening control to the target pressure with a predetermined time constant.
Public/Granted literature
- US20200272178A1 VALVE CONTROL APPARATUS AND VACUUM VALVE Public/Granted day:2020-08-27
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