Invention Grant
- Patent Title: Three dimensional nonvolatile memory device including channel structure and resistance change memory layer
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Application No.: US16844662Application Date: 2020-04-09
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Publication No.: US11056188B2Publication Date: 2021-07-06
- Inventor: Jae Hyun Han , Hyangkeun Yoo , Se Ho Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2019-0111073 20190906
- Main IPC: H01L27/24
- IPC: H01L27/24 ; G11C13/00 ; H01L45/00

Abstract:
A nonvolatile memory device includes a substrate, a source electrode structure disposed on the substrate, a channel structure disposed to be contact a sidewall surface of the source electrode structure, a resistance change memory layer disposed on a sidewall surface of the channel structure, a drain electrode structure disposed to contact the resistance change memory layer, a plurality of gate dielectric structures extending in the first direction and disposed to be spaced apart from each other in a second direction, and a plurality of gate electrode structures disposed to extend in the first direction in the plurality of the gate dielectric structure.
Public/Granted literature
- US20210074354A1 NONVOLATILE MEMORY DEVICE HAVING RESISTANCE CHANGE MEMORY LAYER Public/Granted day:2021-03-11
Information query
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