Invention Grant
- Patent Title: Collet inspection in a semiconductor pick and place apparatus
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Application No.: US16459797Application Date: 2019-07-02
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Publication No.: US11056377B2Publication Date: 2021-07-06
- Inventor: Kui Kam Lam , Kai Siu Lam , Cheuk Ki Tam , Nim Tak Wong , Ka Yee Mak
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B25J15/06 ; B65G47/91 ; H01L21/677

Abstract:
A semiconductor pick and place apparatus comprises: a pick arm having a main body, and a conduit incorporated in the main body for permitting fluid flow through the main body via the conduit, the conduit further defining a holding orifice which is operative in use to secure a semiconductor die, the conduit being configured to convey light received from one side of the pick arm through the holding orifice and an alignment window located on the main body to an opposite side of the pick arm.
Public/Granted literature
- US20210005498A1 COLLET INSPECTION IN A SEMICONDUCTOR PICK AND PLACE APPARATUS Public/Granted day:2021-01-07
Information query
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